我正在试图弄清楚如何将这些表并排放置(或至少以适当的形式放置)
\begin{table}
\caption{Initial measurement of photoresist step heights for $15$ and $30$ wafers ($A^\circ$)}
\label{tab:fonts}
\begin{center}
\begin{minipage}[b]{0.33\linewidth}\centering
\begin{tabular}{|l|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $1$ & 1.4725 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $3$ & 1.4725 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $6$ & 1.495 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $14$ & 1.492 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $16$ & 1.465\\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $20$ & 1.2525 \\
\hline
\end{tabular}
\end{minipage}
\end{center}
\end{table}
\begin{table}
\caption{Post etch measurement of photoresist step heights for $15$ (4 mins) and $30$ (6 mins) wafers ($A^\circ$)}
\label{tab:fonts}
\begin{center}
\begin{tabular}{|l|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $1$ & 1.5875 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $3$ & 1.575 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $6$ & 1.5925 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $14$ & 1.66 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $16$ & 1.63\\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $20$ & 1.4625 \\
\hline
\end{tabular}
\end{center}
\end{table}
\FloatBarrier
\begin{table} [h]
\caption{Post SPM treatment ($nm$)}
\label{tab:fonts}
\begin{center}
\begin{tabular}{|l|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $1$ & 142.5 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $3$ & 142.5 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $6$ & 132.5 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $14$ & 190 \\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $16$ & 197.5\\
\hline
\rule[-1ex]{0pt}{3.5ex} wafer $20$ & 192.5 \\
\hline
\end{tabular}
\end{center}
\end{table}
\FloatBarrier
问题的第二部分:
\begin{table}
\caption{Measurement of oxide thickness for blank wafer before etch (pre etch)} \label{tab:1}
\label{tab:fonts}
\begin{center}
\begin{minipage}[b]{0.33\linewidth}\centering
\begin{tabular}{|l|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
\rule[-1ex]{0pt}{3.5ex} center & 5114 $A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} top & 5236 $A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} right & 5196$A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} bottom & 5156$A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} left & 5211$A^\circ$ \\
\hline
\end{tabular}
\end{minipage}
\end{center}
\end{table}
\begin{table}
\caption{Measurement of oxide thickness for blank wafer after etch (post etch)} \label{tab:2}
\label{tab:fonts}
\begin{center}
\begin{minipage}[b]{0.33\linewidth}\centering
\begin{tabular}{|l|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
\rule[-1ex]{0pt}{3.5ex} center & 3088 $A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} top & 3154 $A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} right & 3133$A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} bottom & 3043$A^\circ$ \\
\hline
\rule[-1ex]{0pt}{3.5ex} left & 3112$A^\circ$ \\
\hline
\end{tabular}
\end{minipage}
\end{center}
\end{table}
答案1
该floatrow
软件包可让您轻松地按标题的顶行对齐标题。无需添加不可见的规则来为行添加一些填充:使用该cellspace
软件包,您可以定义行与上方和下方单元格之间的最小垂直间距。
\documentclass[11pt]{article}
\usepackage[utf8]{inputenc}
\usepackage[showframe]{geometry}
\usepackage{caption, floatrow,cellspace}
\setlength\cellspacetoplimit{5pt}
\setlength\cellspacebottomlimit{5pt}
\DeclareFloatSeparators{mysep}{\hskip1.6em}
\begin{document}
\captionsetup{font=footnotesize}
\floatsetup{floatrowsep=mysep, capposition=TOP, captionskip =1.5ex}
\begin{table}[!hbt]
\begin{floatrow}[3]
\ttabbox[1.5\FBwidth]{\caption{Initial measurement of photoresist step heights for $15$ and $30$ wafers (\AA)}
\label{tab:fontsa}}%
{\begin{tabular}{|Sl|l|}
\hline
wafer $1$ & 1.4725 \\ \hline
wafer $3$ & 1.4725 \\ \hline
wafer $6$ & 1.495 \\ \hline
wafer $14$ & 1.492 \\ \hline
wafer $16$ & 1.465 \\ \hline
wafer $20$ & 1.2525 \\ \hline
\end{tabular}}%
\hfill%
\ttabbox[1.5\FBwidth]{\caption{Post etch measurement of photoresist step heights for $15$ (4 mins) and $30$ (6 mins) wafers (\AA)}%
\label{tab:fontsb}}%
{\begin{tabular}{|Sl|l|}
\hline
wafer $1$ & 1.5875 \\ \hline
wafer $3$ & 1.575 \\ \hline
wafer $6$ & 1.5925 \\ \hline
wafer $14$ & 1.66\\ \hline
wafer $16$ & 1.63 \\ \hline
wafer $20$ & 1.4625 \\ \hline
\end{tabular}}
%
\ttabbox{\caption{Post SPM treat\-ment ($nm$)} \label{tab:fonts3}}
{ \begin{tabular}{|Sl|l|} %% this creates two columns
%% |l|l| to left justify each column entry
%% |c|c| to center each column entry
%% use of \rule[]{}{} below opens up each row
\hline
wafer $1$ & 142.5 \\ \hline
wafer $3$ & 142.5 \\ \hline
wafer $6$ & 132.5 \\ \hline
wafer $14$ & 190 \\ \hline
wafer $16$ & 197.5 \\ \hline
wafer $20$ & 192.5 \\ \hline
\end{tabular}}%
\end{floatrow}
\end{table}
\end{document}
答案2
你喜欢这样的东西吗:
上图生成方式如下:
\documentclass{article}
\usepackage{siunitx}
\begin{document}
\begin{table}
\begin{minipage}[b]{0.3\linewidth}\centering
\caption{Initial measurement of photoresist step heights for $15$ and $30$ wafers ($A^\circ$)}
\label{tab:fonts}
\begin{tabular}{|l|S[table-format=2.5]|}
\hline
wafer $1$ & 1.4725 \\ \hline
wafer $3$ & 1.4725 \\ \hline
wafer $6$ & 1.495 \\ \hline
wafer $14$ & 1.492 \\ \hline
wafer $16$ & 1.465 \\ \hline
wafer $20$ & 1.2525 \\ \hline
\end{tabular}
\end{minipage}
\hfill
\begin{minipage}[b]{0.3\linewidth}\centering
\caption{Post etch measurement of photoresist step heights for $15$ (4 mins) and $30$ (6 mins) wafers ($A^\circ$)}
\label{tab:fonts}
\begin{tabular}{|l|S[table-format=2.5]|}
\hline
wafer $1$ & 1.5875 \\ \hline
wafer $3$ & 1.575 \\ \hline
wafer $6$ & 1.5925 \\ \hline
wafer $14$ & 1.66 \\ \hline
wafer $16$ & 1.63 \\ \hline
wafer $20$ & 1.4625 \\ \hline
\end{tabular}
\end{minipage}
\hfill
\begin{minipage}[b]{0.3\linewidth}\centering
\caption{Post SPM treatment ($nm$)}
\label{tab:fonts}
\begin{tabular}{|l|S[table-format=4.2]|}
\hline
wafer $1$ & 142.5 \\ \hline
wafer $3$ & 142.5 \\ \hline
wafer $6$ & 132.5 \\ \hline
wafer $14$ & 190 \\ \hline
wafer $16$ & 197.5 \\ \hline
wafer $20$ & 192.5 \\ \hline
\end{tabular}
\end{minipage}
\end{table}
\end{document}
在您的 MWE 中, 的角色\rule[-1ex]{0pt}{3.5ex}
被 取代\renewcommand{\arraystretch}{1.3}
,这使得单元格的高度与以前相似。从问题来看,我不清楚您希望通过混合使用“迷你页面”、“中心”环境和 来获得什么\centering
。我清除了所有这些代码并形成了三个minipages
以\centering
命令为中心的表格。
除此之外,我还添加了包siunitx
并使用其S
列类型,以便在表中更好地输入数字。
笔记:我没有费心设置标题的格式。
附录:让我们为问题的第二部分提供代做服务(我这样做是因为我很高兴在修复我的 MikTeX 安装几个小时后它又按预期工作了……)。代码是:
\begin{table}
\centering
\renewcommand{\arraystretch}{1.3}
\begin{minipage}[b]{0.33\linewidth}\centering
\caption{Measurement of oxide thickness for blank wafer before etch (pre etch)} \label{tab:1}
\label{tab:fonts}
\begin{tabular}{|l|S[table-format=5.0,
table-space-text-post=\si{\angstrom}]<{\si{\angstrom}\ }|}
\hline
center & 5114 \\ \hline
top & 5236 \\ \hline
right & 5196 \\ \hline
bottom & 5156 \\ \hline
left & 5211 \\ \hline
\end{tabular}
\end{minipage}
\hfil
\begin{minipage}[b]{0.33\linewidth}\centering
\caption{Measurement of oxide thickness for blank wafer after etch (post etch)} \label{tab:2}
\label{tab:fonts}
\begin{tabular}{|l|S[table-format=5.0,
table-space-text-post=\si{\angstrom}]<{\si{\angstrom}\ }|}
\hline
center & 3088 \\ \hline
top & 3154 \\ \hline
right & 3133 \\ \hline
bottom & 3043 \\ \hline
left & 3112 \\ \hline
\end{tabular}
\end{minipage}
\end{table}
在上面的代码中,我假设 $A^\circ$ 的意思是单位埃。我使用标准化符号,如在 siunitx` 包中定义的那样(第一张表中没有考虑到这一点)。
结果: